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Research Infrastructure

Clean Room of the Microelectronics National Centre

Description Fully operative Clean Room for the development and fabrication of Micro and Nanointegrated devices. The Institute of Microelectronics of Barcelona (IMB), that is part of National Microelectronics Centre (CNM), belongs to the Spanish Research Council (CSIC) and is the largest public micro/nano electronics research and development centre in Spain. Embedded administratively in CNM-IMB, although having a separate and well defined structure and operating policies, there is the Large Scale Facility called “ICTS Sala Blanca integrada de Micro y Nanofabricación” (ICTS- Integrated Micro and Nanofabrication Clean Room). Micro and Nano Technologies (MNT) and related Microsystems and MEMS devices are horizontal and disruptive ICT technologies with clear impact in all fields of research and social and economic activity as well stated in the European Commission Framework Programme. Clean Rooms like the CNM-IMB ICTS are key infrastructures for carrying out fundamental applied and industrial research in those high tech fields in the south of Europe. This RI is an ICTS (Unique Scientific and Technological Infrastructure), included in the Spanish National Roadmap for RIs.
URL http://www.imb-cnm.csic.es/index.php?option=com_content&view=article&id=13&Itemid=69&lang=en
Status Operational since 1991
Scientific Domains Physical Sciences and Engineering
RI Categorization Micro- and Nanotechnology facilities
Location Cerdanyola del Vallès, Barcelona, 08193, Spain
MERIL URL http://portal.meril.eu/meril/view/facilitys/15026