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|Description||The IMT Support Centre for MIcro- and NAnoFABrication (IMT-MINAFAB) at the National Institute for R&D in Microtechnologies (IMT Bucharest) is an experimental facility - in operation since 2009 - covering the full development cycle for micro- and nano systems and devices: design-modeling-simulation, basic and advanced processing, complex characterization, device/system integration, and reliability testing. It consists of clean room and grey room areas (ISO 6&5 - 200 sqm, ISO7 - 120 sqm, ISO 8 - 300 sqm) and specialized labs (60 sqm), equipped with state of the art equipments (worth ~9Meuro), including a mask shop, micro- and nanolithography, plasma-based processing and depositions, e-beam depositions, high level characterization etc. The centre is open to multidisciplinary research, education and industry cooperation and offers direct and indirect access to basic or complex services for academic and industrial users through various collaboration schemes. IMT-MINAFAB has been involved in almost 40 European projects (FP6, FP7, and related), including the development and incorporation of MIMOMEMS, an European Centre of Excellence in Microwave, Millimetre Wave and Optical Devices, based on Micro-Electro-Mechanical Systems for Advanced Communication Systems and Sensors. It is ISO 9001:2008 certified since 2011.|
|Status||Operational since 2009 Being upgraded (2013 - 2015)|
|Scientific Domains||Environmental Sciences Biological and Medical Sciences Material Sciences and Analytical Facilities e-Infrastructures Energy|
|RI Categorization||Research Facilities|
|Location||Erou Iancu Nicolae, Voluntari, 077190, Bucharest, Romania|