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|Description||The clean room facility, the Laboratory of Microtechnology of MTA TTK MFA consists of a CMOS Si technology line, mask shop, a bulk micromachining design and fabrication line, a laboratory of microfluidics and a semiconductor photovoltaic development facility. The mission of the Laboratory of Microtechnology is the research and development of sensor principles, devices, actuators, functional micro and nanostructures by integrated the knowledge bases of microtechnology, biology, physics, chemistry, and other disciplines.|
|Status||Operational since 1971|
|Scientific Domains||Material Sciences and Analytical Facilities Physical Sciences and Engineering e-Infrastructures Energy|
|RI Categorization||Mechanical Engineering Facilities|
|Location||Konkoly Thege Miklós út 29-33, Budapest, 1121, Hungary|