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Research Infrastructure

Hungarian Academy of Sciences, Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Department of Microtechnology – MEMS Laboratory

Description The clean room facility, the Laboratory of Microtechnology of MTA TTK MFA consists of a CMOS Si technology line, mask shop, a bulk micromachining design and fabrication line, a laboratory of microfluidics and a semiconductor photovoltaic development facility. The mission of the Laboratory of Microtechnology is the research and development of sensor principles, devices, actuators, functional micro and nanostructures by integrated the knowledge bases of microtechnology, biology, physics, chemistry, and other disciplines.
URL http://www.mems.hu
Status Operational since 1971
Scientific Domains Material Sciences and Analytical Facilities
Physical Sciences and Engineering
RI Categorization Mechanical Engineering Facilities
Location Konkoly Thege Miklós út 29-33, Budapest, 1121, Hungary
MERIL URL http://portal.meril.eu/meril/view/facilitys/15164